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The sample to be analyzed is diluted with water in a 1:1 ratio. The solution is pumped into the nebuliser with a peristaltic pump. An argon stream thereby nebulises the sample to form an aerosol. The large droplets are removed in the spray chamber.  The aerosol thus prepared now enters the plasma, a mixture of atoms, ions and electrons. The extremely hot plasma of about 10,000 °C excites the individual elements.
The excited elements emit radiation with characteristic wavelengths for each individual element. The emission lines are spread out and the intensity detected with a CCD chip. A full emission spectrum is recorded simultaneously. The element contents oft he samples are determined with previously established calibration lines.